| 发明名称 |
PROCEDE DE PASSIVATION CHIMIQUE D'UNE SURFACE D'UN PRODUIT DE MATERIAU SEMI-CONDUCTEUR III-V, ET PRODUIT OBTENU PAR UN TEL PROCEDE |
| 摘要 |
<p>A method for chemically passivating a surface of a product made of a III-V semiconductor material in which a) a P(N) polymer film is formed by deposition in a solvent comprising liquid ammonia. The film is formed by deposition, without electrochemical assistance, in the solvent, in the presence of an oxidizing chemical additive comprising phosphorous and generating electrical charge carriers in said surface.</p> |
| 申请公布号 |
FR2976718(B1) |
申请公布日期 |
2013.07.05 |
| 申请号 |
FR20110055157 |
申请日期 |
2011.06.14 |
| 申请人 |
CENTRE NATIONAL DE LA RECHERCHE SCIENTIFIQUE - CNRS -;ECOLE POLYTECHNIQUE;UNIVERSITE DE VERSAILLES SAINT-QUENTIN-EN-YVELINES |
发明人 |
ETCHEBERRY ARNAUD;GONCALVES ANNE-MARIE;MATHIEU CHARLES;VIGNERON JACKY;MEZAILLES NICOLAS;LE FLOCH PASCAL |
| 分类号 |
H01L21/312;H01L21/3105 |
主分类号 |
H01L21/312 |
| 代理机构 |
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