| 摘要 |
The process of fabricating a structure (10) comprising a graphene sheet (11) equipped with metal pads (12) over one of its faces, where the pads are separated from each other by a dielectric medium chosen from the air and dielectric materials, comprises synthesizing the graphene sheet on many metal pads that are laid on a membrane of a dielectric material or integrated into the membrane by catalytic growth in vapor phase, and optionally eliminating the membrane. The catalytic growth of graphene is carried out by chemical vapor deposition using a gas stream. The process of fabricating a structure (10) comprising a graphene sheet (11) equipped with metal pads (12) over one of its faces, where the pads are separated from each other by a dielectric medium chosen from the air and dielectric materials, comprises synthesizing the graphene sheet on many metal pads that are laid on a membrane of a dielectric material or integrated into the membrane by catalytic growth in vapor phase, and optionally eliminating the membrane. The catalytic growth of graphene is carried out by chemical vapor deposition using a gas stream comprising optionally 1-3C and 1-2C hydrocarbons by mixing with hydrogen or a hydrogen compound and/or inert gases at a temperature of 800-1200[deg] C and a pressure less than atmospheric pressure but greater than 10 -> 6>Pa. The metal pads are constituted of a metal or a mixture of metals of which the lattice parameter does not differ more than 2% of the graphene, and form a non-regular network. The largest area of the metal pads is measured in nanoscale in a direction parallel to the plane of the membrane dielectric. The distance between two adjacent metal pads has nanoscale dimension. The process further comprises preparing the metal pads, and filling of openings that comprises a support with a metal or its alloy, where the openings of the support form a non-regular network. The support is constituted by the membrane of dielectric material, and in that the openings of the support correspond to the pores that comprise the membrane before filling of the openings by the metal or its alloy. An independent claim is included for a structure comprising a graphene sheet. |
