| 摘要 |
PURPOSE: A porous chuck improving vacuum suction power is provided to increase a lifetime thereof by preventing foreign materials which is inputted to pores of a specific part formed on the porous chuck. CONSTITUTION: A porous ceramic is built in a girth(1120) of a frame(1100). A diffusion exhausting unit(1130) passes through the bottom of the frame and is connected to a vacuum hole. The diffusion exhausting unit diffuses the vacuum suction power applied to the vacuum hole. The porous ceramic is formed on the surface of the ceramic exhausting unit corresponding to the diffusion exhausting unit. The ceramic exhausting unit diffuses the vacuum suction power. |
