| 摘要 |
<p>PURPOSE: A method for manufacturing a FTO(Fluorine Doped Tin Oxide) transparent conductive film with nonlinear continuous transfer device is provided to improve the uniformity of a thin film on a curved substrate by transferring a glass substrate to a pre-heating chamber, deposition chamber, and a annealing heat chamber by stages. CONSTITUTION: A pre-heating unit(2), a deposition unit(1), and an annealing heat chamber(3) are connected to a nonlinear transfer apparatus. The nozzle unit is attached to a complex shaped substrate at a right angle. An exhaust unit is installed at the side of a nozzle. The substrate is heated and surface-processed, and moved to the deposition unit. A FTO free cursor is sprayed through the nozzle of the deposition unit. The FTO free cursor reaches the substrate through the FTO free cursor. An even curved surface FTO film is formed. A curved substrate with FTO is rapidly cooled in an annealing heat unit. [Reference numerals] (2) Pre-heating unit; (3) Annealing part; (4) Air knife(Air curtain); (5) Tension device; (6) Mist supply; (7) Exhaust</p> |
