| 摘要 |
PURPOSE: A rubbing stage for a rubbing equipment is provided to reduce the cost required to replace a stage by replacing only a part of the stage but replacing a whole stage. CONSTITUTION: In order to vacuum-absorb a substrate, at least one suction hole (31) is formed in a substrate support stage (3). Connection holes (11) of a base stage (1) are connected to suction holes of the substrate support stage. Multiple support holes (21) of the base stage vacuum-absorbs a rear side of the substrate support stage. A vacuum pump is connected to connection holes and supported holes, vacuum-absorbed the substrate and substrate support stage. |
