| 摘要 |
PURPOSE: An exposure mask, a mask film clamping device using the same, and a mask film clamping method using the same are provided to firmly fix a mask film on a frame by chemically bonding a fusing member fixed on the frame with the mask film. CONSTITUTION: A mask film clamping device(100) includes a fusing member fixing unit, a transversal direction clamping unit(160), a transversal drawing unit(140), a longitudinal clamping unit(170), a longitudinal drawing unit(150), and a fusing unit. The frame includes a horizontal installation groove(210) and a vertical installation groove(220). The fusing member fixing unit fixes the fusing member to the transversal installation groove and vertical installation groove. The transversal clamping unit clamps one transversal end of a mask film. The transversal drawing unit draws another transversal end of the mask film. The vertical clamping unit clamps one vertical end of the mask film. The vertical drawing unit draws another vertical end of the mask film. The fusing unit fuses the mask film and the fusing member. |
