| 发明名称 |
GRAPHENE ELECTRONIC DEVICE AND MANUFACTURING METHOD THEREOF |
| 摘要 |
A method of manufacturing a graphene electronic device may include forming a metal compound layer and a catalyst layer on a substrate, the catalyst layer including a metal element in the metal compound layer, growing a graphene layer on the catalyst layer, and converting the catalyst layer into a portion of the metal compound layer.
|
| 申请公布号 |
US2013171781(A1) |
申请公布日期 |
2013.07.04 |
| 申请号 |
US201213478548 |
申请日期 |
2012.05.23 |
| 申请人 |
LEE CHANG SEUNG;KIM SANG WOOK;PARK SEONG JUN;SEO DAVID;YUN YOUNG JUN;LEE YUNG HEE;SAMSUNG ELECTRONICS CO., LTD. |
发明人 |
LEE CHANG SEUNG;KIM SANG WOOK;PARK SEONG JUN;SEO DAVID;YUN YOUNG JUN;LEE YUNG HEE |
| 分类号 |
H01L21/336;H01L21/329 |
主分类号 |
H01L21/336 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
|
| 地址 |
|
