| 摘要 |
Disclosed is a method of forming a graphene layer, including: putting a substrate in a chamber of an electron cyclotron resonance device, and then vacuuming the chamber. Conducting a carbon-containing gas into the chamber, wherein the carbon-containing gas has a pressure of 10-2 torr to 10-4 torr in the chamber. Heating the substrate until the substrate has a temperature of 100° C. to 600° C., and using a microwave with an electron cyclotron resonance mechanism to excite the carbon-containing gas to deposit a graphene layer on the substrate. |
