发明名称 |
DICING SHEET WITH PROTECTIVE FILM-FORMING LAYER, AND METHOD FOR PRODUCING CHIP |
摘要 |
[Problem] To provide a dicing sheet with a protective film-forming layer, which enables easy production of a semiconductor chip that has a protective film having high uniformity and excellent printing accuracy, which has excellent chip affixing ability during dicing, and wherein the protective film and a base film can be easily separated from each other. [Solution] A dicing sheet with a protective film-forming layer of the present invention is characterized by comprising a protective film-forming layer on an adhesive layer of an adhesive sheet with a peel strength adjusting layer being interposed therebetween, said adhesive sheet being composed of a base film and the adhesive layer. This dicing sheet with a protective film-forming layer is also characterized in that: a laminate of the peel strength adjusting layer and the protective film-forming layer is arranged in the inner circumferential part of the adhesive sheet; the adhesive layer is exposed in the outer circumferential part of the adhesive sheet; and the peel strength between the peel strength adjusting layer and a protective film that is obtained by curing the protective film-forming layer is 0.05-5 N/25 mm. |
申请公布号 |
WO2013099869(A1) |
申请公布日期 |
2013.07.04 |
申请号 |
WO2012JP83478 |
申请日期 |
2012.12.25 |
申请人 |
LINTEC CORPORATION |
发明人 |
SHINODA, TOMONORI;TAKANO, KEN |
分类号 |
H01L21/301;B32B27/00;C09J7/02;H01L21/02 |
主分类号 |
H01L21/301 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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