发明名称 PHENOLIC RESIN COMPOSITION, AND METHODS FOR MANUFACTURING CURED RELIEF PATTERN AND SEMICONDUCTOR
摘要 Provided is a photopolymer composition for a semiconductor element surface protective film or an interlayer insulating film, in which a solution of the photopolymer composition comprises 100 parts by mass of (A) a phenolic resin having a biphenyldiyl structure in a main chain of the resin; 1 to 30 parts by mass of (B) a photo acid-generating agent; and 1 to 60 parts by mass of (C) a compound that can be reacted with ingredient (A) by means of an acid generated from the photo acid-generating agent or heat.
申请公布号 US2013168829(A1) 申请公布日期 2013.07.04
申请号 US201113820772 申请日期 2011.09.12
申请人 SASAKI TAKAHIRO;LI JUN;ASAHI KASEI E-MATERIALS CORPORATION 发明人 SASAKI TAKAHIRO;LI JUN
分类号 G03F7/004;H01L21/30;H01L29/06 主分类号 G03F7/004
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