MOTIONLESS ION BEAM BENDING OF 1, 2-DIMENSIONAL NANOSTRUCTURE

摘要

PURPOSE: A motionless bending method of one-dimensional or two-dimensional nanostructure using ion beams is provided to repetitively use high energy ion beams and low energy ion beams, thereby controlling a bending direction and shape of nanostructure without movement of the nanostructure. CONSTITUTION: A motionless bending method of one-dimensional or two-dimensional nanostructure using ion beams comprises following steps. One-dimensional or two-dimensional nanostructure (20) is bent by irradiating ion beams (10). According to the energy of the ion beams, a bending direction of the nanostructure is controlled. A bending direction and a shape of the nanostructure are controlled by repetitively irradiation of high energy ion beams (11) and low energy ion beams (12). The high energy ion beams have energy which bends the nanostructure to an ion beam direction (S). The low energy ion beams have energy which bends the nanostructures to an ion beam progressive direction (P). According to the thickness of the nanostructures, a bending direction of the nanostructures is controlled.