| 摘要 |
An apparatus and a method for inspecting the appearance of a substrate are provided to precisely and stably examine the whole substrate by stably irradiating light at a distance adjacent to a non-irradiating region even if a location and a rotational angle of the substrate are changed variously. A substrate positioning system(100) places a substrate(119) on a substrate fixing frame(117) for fixing the substrate so that a surface of the substrate is inspected. A first lightening system(200) irradiates light to the substrate surface to inspect whether defect is on the substrate surface. A second lightening system(300) irradiates light to a non-irradiated region that is not lightened by the first lightening system. The second lightening system irradiates the light to a non-irradiated region generated by the substrate fixing frame when the rear of the substrate is examined. The second lightening system is installed on the substrate fixing frame. The first lightening system is located on an upper side of the substrate and the second lightening system is located on a lower side of the substrate. |
