| 摘要 |
PROBLEM TO BE SOLVED: To provide a laser beam machining apparatus having a function of discharging dust that exists in a machining chamber.SOLUTION: The laser beam machining apparatus includes a chuck table for holding a workpiece; a laser beam irradiating means for irradiating the workpiece with laser beams of wavelength with transmitting property while adjusting a condensing point to the inside of the workpiece held to the chuck table, thereby forming a modified layer inside the workpiece; a machining feed means for moving the chuck table in a machining feed direction; an indexing feed means for moving the chuck table in an indexing feed direction orthogonal to the machining feed direction; and an outer cover for holding the chuck table, the laser beam irradiating means, the machining feed means and the indexing feed means inside to partition the machining chamber. An exhaust port communicating with a suction source through an exhaust passage is opened to a part of the outer cover that partitions the machining chamber, and the exhaust port is located below a machining point of the workpiece irradiated with laser beams, the machining feed means and the indexing feed means. |
