摘要 |
A variable resistance memory device includes a first trench extending in a first direction formed in a first insulation layer, a first conductive layer in the first trench, a protective layer over the first conductive layer in the first trench, a second insulation layer over the first insulation layer and the protective layer, a second trench formed in the second insulation layer and extending in a second direction that crosses the first direction, a gap formed in the protective layer exposing the first conductive layer at an intersection between the first trench and the second trench, a variable resistance layer positioned in the gap and coupled to the first conductive layer, and a second conductive layer formed in the second trench and coupled to the variable resistance layer.
|