ELECTRONIC DEVICE, METHOD OF MANUFACTURING THE SAME, AND OSCILLATOR

摘要

PROBLEM TO BE SOLVED: To provide an electronic device that keeps a degree of vacuum of a cavity intact.SOLUTION: An electronic device 100 includes: a substrate 10; a function element 20 formed on the substrate 10; a surrounding wall 30 formed on the substrate 10 to define a cavity 1 in which the function element 20 is arranged; and an interlayer insulation layer 62 formed on the substrate 10 and around the surrounding wall 30 in a plan view. The surrounding wall 30 has a first surrounding layer 42 formed around the function element 20 in a plan view. A side surface 43 of the first surrounding layer 42 is inclined to an upper surface 11 of the substrate 10. The interlayer insulation layer 62 covers the side surface 43 of the first surrounding layer 42.