| 摘要 |
the present invention is characterized in that a filter made of resin comprises a through-hole film portion (14); and a structure reinforce portion (13), wherein a through-hole (15) is provided in a through-hole film portion (14), the thickness of the through-hole film portion (14) is from 0.5 to 2.0 mum, the bore of the through-hole (15) is from 0.05 to 0.5 mum, the thickness of the structure reinforce portion (13) is bigger than the thickness of the through-hole film portion (14), the structure reinforce portion (13) encloses the through-hole film portion (14), a damage-reduction structure is provided on the upper surface of the structure reinforce portion (13), and wherein, the damage-reduction structure may be an uneven structures.
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