APPARATUS FOR REMOVING PARTICLE AND APPARATUS FOR PROCESSING SUBSTRATE USING THE SAME

摘要

PURPOSE: A particle removing device and a substrate processing apparatus using the same are provided to reduce maintenance and repair costs by extending a replacement period of a filter to remove particles. CONSTITUTION: A housing (110) includes a cover (112) and a body (111) combined with the cover. An exhaust port (117) is formed in the body to discharge a gas from the housing to the outside. A filter (120) is arranged in the housing. A diffusion plate (130) is combined with one end of the filter facing an inhalation hole (114). The diffusion plate prevents the gas from being inputted to a hollow part (121) of the filter from the housing.