| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for producing silicon fine particles with a high yield and an apparatus therefor.SOLUTION: The method for producing silicon fine particles includes: a step A of heating a precursor by using a heating means in an inert atmosphere in a zone 20 formed of a non-carbon substance, wherein the precursor is produced by drying a mixture comprising a silicon source and a carbon source; and a step B of rapidly cooling a gas generated by heating the precursor in an inert atmosphere in the zone 20 formed of the non-carbon substance. The silicon source and/or the carbon source is in a liquid form. |
