发明名称 |
SWITCHABLE FILTERS AND DESIGN STRUCTURES |
摘要 |
Switchable and/or tunable filters, methods of manufacture and design structures are disclosed herein. The method of forming the filters includes forming at least one piezoelectric filter structure comprising a plurality of electrodes formed on a piezoelectric substrate. The method further includes forming a micro-electro-mechanical structure (MEMS) comprising a MEMS beam formed above the piezoelectric substrate and at a location in which, upon actuation, the MEMS beam shorts the piezoelectric filter structure by contacting at least one of the plurality of electrodes.
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申请公布号 |
US2013169383(A1) |
申请公布日期 |
2013.07.04 |
申请号 |
US201213342375 |
申请日期 |
2012.01.03 |
申请人 |
ADKISSON JAMES W.;CANDRA PANGLIJEN;DUNBAR THOMAS J.;GAMBINO JEFFREY P.;JAFFE MARK D.;STAMPER ANTHONY K.;WOLF RANDY L.;INTERNATIONAL BUSINESS MACHINES CORPORATION |
发明人 |
ADKISSON JAMES W.;CANDRA PANGLIJEN;DUNBAR THOMAS J.;GAMBINO JEFFREY P.;JAFFE MARK D.;STAMPER ANTHONY K.;WOLF RANDY L. |
分类号 |
H03H9/00;G06F17/50;H01L21/02;H03H9/54;H03H9/64 |
主分类号 |
H03H9/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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