发明名称 |
SOLID STATE IMAGE PICKUP DEVICE AND METHOD OF PRODUCING SOLID STATE IMAGE PICKUP DEVICE |
摘要 |
Forming a back-illuminated type CMOS image sensor, includes process for formation of a registration mark on the wiring side of a silicon substrate during formation of an active region or a gate electrode. A silicide film using an active region may also be used for the registration mark. Thereafter, the registration mark is read from the back-side by use of red light or near infrared rays, and registration of the stepper is accomplished. It is also possible to form a registration mark in a silicon oxide film on the back-side (illuminated side) in registry with the registration mark on the wiring side, and to achieve the desired registration by use of the registration mark thus formed.
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申请公布号 |
US2013171760(A1) |
申请公布日期 |
2013.07.04 |
申请号 |
US201213711215 |
申请日期 |
2012.12.11 |
申请人 |
SONY CORPORATION;SONY CORPORATION |
发明人 |
ABE TAKASHI;NAKAMURA NOBUO;MABUCHI KEIJI;UMEDA TOMOYUKI;FUJITA HIROAKI;FUNATSU EIICHI;SATO HIROKI |
分类号 |
H01L31/0232;H01L21/027;H01L23/544;H01L27/14;H01L27/146;H01L31/0216;H04N5/335;H04N5/369;H04N5/374 |
主分类号 |
H01L31/0232 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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