发明名称 |
ZINC OXIDE PRECURSOR AND METHOD OF DEPOSITING ZINC OXIDE-BASED THIN FILM USING THE SAME |
摘要 |
A zinc oxide precursor for use in deposition of a zinc oxide-based thin film contains a zincocene having the following formula or a derivative thereof: where R1 and R2 are hydrogen or CnH2n+1. The n is a number selected from 1 to 3, and the R1 and R2 is one selected from the group consisting of hydrogen, a methyl group, an ethyl group and an i-propyl group. A method of depositing a zinc oxide-based thin film includes the following steps of: loading a substrate into a deposition chamber; and supplying the above-described zinc oxide precursor and an oxidizer into the deposition chamber and forming a zinc oxide-based thin film on the substrate via chemical vapor deposition. In an exemplary embodiment, the zinc oxide-based thin film may be formed on the substrate via atmospheric pressure chemical vapor deposition.
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申请公布号 |
US2013171341(A1) |
申请公布日期 |
2013.07.04 |
申请号 |
US201213681191 |
申请日期 |
2012.11.19 |
申请人 |
SAMSUNG CORNING PRECISION MATERIALS CO., LTD;SAMSUNG CORNING PRECISION MATERIALS CO., LTD. |
发明人 |
PARK SOOHO;KIM SEOHYUN;PARK JEONGWOO;PARK TAEJUNG;YOO YOUNGZO;YOON GUNSANG;CHOI EUN-HO;KIM MYONG WOON;KIM BOGYEONG;SHIN HYUNG SOO;YOO SEUNG HO;LEE SANG DO;LEE SANG ICK;YIM SANG JUN |
分类号 |
C07F3/06 |
主分类号 |
C07F3/06 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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