| 摘要 |
PROBLEM TO BE SOLVED: To provide a transfer robot capable of inhibiting the heating of an arm by radiant heat from a substrate.SOLUTION: The transfer robot includes a first arm having a base end rotatably coupled to an arm base and having a predetermined drive system internally disposed; a second arm having a based end rotatably coupled to an end of the first arm and following the first arm; a hand rotatably coupled to an end of the second arm via a hand base and capable of placing the predetermined substrate thereon, and a reflector disposed between the first arm and second arm, and reflecting heat from the substrate placed on the hand upward. |
