| 摘要 |
PROBLEM TO BE SOLVED: To provide a manufacturing method of an MEMS vibrator which achieves high reliability.SOLUTION: A manufacturing method of an MEMS vibrator 100 includes the steps of: forming a coating layer 23 covering a first electrode 22; depositing a semiconductor layer 24a on the coating layer 23 and the substrate 10; forming a mask layer M1, overlapping with the coating layer 23 in a plane view, on the semiconductor layer 24a; etching the semiconductor layer 24a using the mask layer M1 as a mask; forming a side wall 39 on a side surface of the etched semiconductor layer 24a; patterning the etched semiconductor layer 24a after the formation process of the side wall 39 and forming a second electrode 24; removing the coating layer 23. In the formation process of the mask layer M1, the mask layer M1 is formed so that the coating layer 23 is positioned at the inner side of an outer edge of the mask layer M1 in the plane view. |
