发明名称 ELECTRICAL PROPERTY MEASURING APPARATUS FOR PRESSURE SENSOR AND MEASURING METHOD THEREOF
摘要 An electrical property measuring apparatus for pressure sensor includes a first plate, a second plate, an object to be measured, an electrical property measuring unit used for measuring the electrical properties of the object, and a fluid supplying system. The second plate is opened or closed relative to the first plate. The object is disposed between the first plate and the second plate. The fluid supplying system connects to a space formed by the first plate and a pressed surface or a space formed by the second plate and a pressed surface. The fluid supplying system provides a fluid to the space such that the fluid presses on the object and the electrical property measuring unit measures the electrical properties of the object. A method of measuring electrical property for pressure sensor is also provided.
申请公布号 US2013167651(A1) 申请公布日期 2013.07.04
申请号 US201213423294 申请日期 2012.03.19
申请人 CIOU JYUN-KAI;LIN YAN-RUNG;LIOU CHANG-HO;INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE 发明人 CIOU JYUN-KAI;LIN YAN-RUNG;LIOU CHANG-HO
分类号 G01L9/00 主分类号 G01L9/00
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