摘要 |
An electrical property measuring apparatus for pressure sensor includes a first plate, a second plate, an object to be measured, an electrical property measuring unit used for measuring the electrical properties of the object, and a fluid supplying system. The second plate is opened or closed relative to the first plate. The object is disposed between the first plate and the second plate. The fluid supplying system connects to a space formed by the first plate and a pressed surface or a space formed by the second plate and a pressed surface. The fluid supplying system provides a fluid to the space such that the fluid presses on the object and the electrical property measuring unit measures the electrical properties of the object. A method of measuring electrical property for pressure sensor is also provided.
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