发明名称 |
MICROELECTROMECHANICAL SYSTEM DEVICE WITH ELECTRICAL INTERCONNECTIONS AND METHOD FOR FABRICATING THE SAME |
摘要 |
A microelectromechanical system device including anchors and mass is provided. Electrical interconnections are formed on the mass by using a insulation layer of mass, an electrical insulation trench and conductive through hole. The electrical interconnections replace the cross-line structure without adding additional processing steps, thereby reducing the use of the conductive layer and the electrical insulation layer. A method for fabricating the microelectromechanical system device is also provided.
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申请公布号 |
US2013167632(A1) |
申请公布日期 |
2013.07.04 |
申请号 |
US201213459271 |
申请日期 |
2012.04.30 |
申请人 |
HUANG CHAO-TA;HSU YU-WEN;KUO CHIN-FU;INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE |
发明人 |
HUANG CHAO-TA;HSU YU-WEN;KUO CHIN-FU |
分类号 |
G01P3/42;H01L21/306 |
主分类号 |
G01P3/42 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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