发明名称 PROGRESSIVE-REFRACTIVITY ANTIREFLECTION LAYER AND METHOD FOR FABRICATING THE SAME
摘要 The present invention discloses a progressive-refractivity antireflection layer and a method for fabricating the same to eliminate light reflection occurring in an interface. The present invention is characterized in being fabricated via depositing a first material and a second material, and having a refractivity (neff) gradually varying with a thickness thereof and ranging between a refractivity (n1) of the first material and a refractivity (n2) of the second material. No matter at what thickness the refractivity (neff) of the antireflection layer is measured, the refractivity (neff) meets an effective medium theory expressed by an equation: neff={n12f+n22(1-f)}1/2, wherein f is a filling ratio of the first material of the antireflection layer.
申请公布号 US2013171753(A1) 申请公布日期 2013.07.04
申请号 US201313774269 申请日期 2013.02.22
申请人 TAIWAN MICROPAQ CORPORATION;TAIWAN MICROPAQ CORPORATION 发明人 WANG JIN SHIAN
分类号 H01L21/02;H01L33/58 主分类号 H01L21/02
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