发明名称 METAL SILICIDE NANOWIRES AND METHODS OF THEIR PRODUCTION
摘要 The present invention provides metal silicide nanowires, including metallic, semiconducting, and ferromagnetic semiconducting transition metal silicide nanowires. The nanowires are grown using either chemical vapor deposition (CVD) or chemical vapor transport (CVT) on silicon substrates covered with a thin silicon oxide film, the oxide film desirably having a thickness of no greater than about 5 nm and, desirably, no more than about 2 nm (e.g., about 1-2 nm). The metal silicide nanowires and heterostructures made from the nanowires are well-suited for use in CMOS compatible wire-like electronic, photonic, and spintronic devices.
申请公布号 US2013171465(A1) 申请公布日期 2013.07.04
申请号 US201313763075 申请日期 2013.02.08
申请人 WISCONSIN ALUMNI RESEARCH FOUNDATION;WISCONSIN ALUMNI RESEARCH FOUNDATION 发明人 JIN SONG;SCHMITT ANDREW L.;SONG YIPU
分类号 H01L29/49 主分类号 H01L29/49
代理机构 代理人
主权项
地址