The application describes an anti-reflective coating obtained from a composition of at least one silane compound, at least one metal compound and at least one organic compound having at least two functional groups which can form a coordination polymer. The invention further describes a method for the production of an anti-reflective coating.
申请公布号
WO2013098090(A1)
申请公布日期
2013.07.04
申请号
WO2012EP75492
申请日期
2012.12.14
申请人
LEIBNIZ-INSTITUT FUER NEUE MATERIALIEN GEMEINNUETZIGE GMBH
发明人
DE OLIVEIRA, PETER WILLIAM;CARVALHO MENEZES, ELISABETE HENRIQUETTA SOARES DE;JILAVI, MOHAMMAD;KOENIG, PETER
