发明名称 NONVOLATILE STORAGE DEVICE
摘要 PROBLEM TO BE SOLVED: To provide an excellent nonvolatile storage device having advantage for miniaturization, small initial threshold value variance and high write efficiency, with no erasure failure and no storage failure.SOLUTION: A nonvolatile storage device comprises a laminated film, which is arranged to extend from between a semiconductor substrate and a gate electrode to over at least a surface on a side of a first impurity diffusion region on the gate electrode, and is provided with a charge accumulating layer and a tunnel insulating film in this order from the gate electrode side.
申请公布号 JP2013131772(A) 申请公布日期 2013.07.04
申请号 JP20130025458 申请日期 2013.02.13
申请人 NEC CORP 发明人 TSUJI YUKIHIDE
分类号 H01L21/336;H01L21/8247;H01L27/115;H01L29/788;H01L29/792 主分类号 H01L21/336
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