| 摘要 |
PURPOSE: A laser thermal doming measurement device, a thermal doming measurement system with the same, and a laser thermal doming measurement method are provided to measure the laser distribution without a data loss while transferring a gas cell at high speed. CONSTITUTION: A laser thermal doming measurement device includes a laser emitting unit (61), a beam distribution measuring unit (63), a gas cell (71), a gas cell transferring device (70), a transfer sensing unit, and a control unit. The beam distribution measuring unit measures the distribution of laser beams. The laser beams are penetrated through the gas cell. The transfer sensing unit senses a position of the gas cell, thereby generating start signals and finish signals. The control unit controls the operation of the laser emitting unit and the beam distribution measuring unit based on the start and finish signals.
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