发明名称 |
DOUBLE-SIDED REUSABLE TEMPLATE FOR FABRICATION OF SEMICONDUCTOR SUBSTRATES FOR PHOTOVOLTAIC CELL AND MICROELECTRONICS DEVICE MANUFACTURING |
摘要 |
This disclosure presents manufacturing methods and apparatus designs for making TFSSs from both sides of a re-usable semiconductor template, thus effectively increasing the substrate manufacturing throughput and reducing the substrate manufacturing cost. This approach also reduces the amortized starting template cost per manufactured substrate (TFSS) by about a factor of 2 for a given number of template reuse cycles.
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申请公布号 |
US2013171808(A1) |
申请公布日期 |
2013.07.04 |
申请号 |
US201213554103 |
申请日期 |
2012.07.20 |
申请人 |
MOSLEHI MEHRDAD M.;KRAMER KARL-JOSEF;WANG DAVID XUAN-QI;KAPUR PAWAN;NAG SOMNATH;KAMIAN GEORGE D.;ASHJAEE JAY;YONEHARA TAKAO;SOLEXEL, INC. |
发明人 |
MOSLEHI MEHRDAD M.;KRAMER KARL-JOSEF;WANG DAVID XUAN-QI;KAPUR PAWAN;NAG SOMNATH;KAMIAN GEORGE D.;ASHJAEE JAY;YONEHARA TAKAO |
分类号 |
H01L21/20 |
主分类号 |
H01L21/20 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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