| 摘要 |
PROBLEM TO BE SOLVED: To stabilize film quality by improving the thickness uniformity of a film formed on a substrate, and preventing generation of particles.SOLUTION: A film forming apparatus includes: an inlet port 132a and an outlet port 132b; a rectifying member 132 facing spray nozzles 130 across a gap 133; and a plurality of first fan mechanisms, each of which has a jet port positioned adjacent to a spray port 130a of the spray nozzle 130 disposed at both ends among the plurality of spray nozzles 130. |
