| 摘要 |
PROBLEM TO BE SOLVED: To efficiently clean inside in a liquid material coating device.SOLUTION: A liquid supply channel 7 introduces a liquid material from a liquid material storage tank 5 or a cleaning liquid from a cleaning liquid storage tank 10 into an atomizer (two fluid spray nozzles) of a spraying unit 4. A flow path switching mechanism 14 switches a connection to the liquid supply channel 7 from the liquid material storage tank 5 to the cleaning liquid storage tank 10 at cleaning. As a result, the atomizer atomizes the introduced cleaning liquid and sprays it to a cleaning object area. |
