SUBSTRATE DICING JIG, PROCESSING APPARATUS, AND SUBSTRATE DICING METHOD

摘要

The present invention concerns a substrate dicing jig used for dicing circuit substrates, a processing apparatus and a dicing method, and has as a goal realizing highly efficient and high quality substrate dicing. A substrate dicing jig (100) is used that is provided with the following: a plurality of suction holes (12, 13) that attach by vacuum pressure a circuit substrate (200) and that are formed in a loading surface (11) for loading the circuit substrate (200) which has mounted thereon a plurality of elements; a plurality of laser beam receiving grooves (15) that are for receiving laser beams and that formed in the loading surface (11) along the sweep lines of the laser beams applied to the circuit substrate (200) for dicing the circuit substrate (200); and suction holes (16) that are formed so as to communicate with each of the laser beam receiving grooves (15) and that suction the melted material of the circuit substrate (200) resulting from the dicing of the circuit substrate (200).