| 摘要 |
PROBLEM TO BE SOLVED: To measure a thickness dimension or the like of an object to be measured easily and at low cost by means of a simple device and arithmetic processing.SOLUTION: An article is created based on design information and includes a substrate of a known X-ray absorption coefficient and a measured target member of a known X-ray absorption coefficient different from that of the substrate. The article is irradiated with X-rays and the dosage of X-rays transmitted through the article is measured. An X-ray nondestructive inspection apparatus 10 comprises an X-ray source which irradiates the article with X-rays, a detector 60 which detects the dosage of X-rays transmitted through different two spots on the article at the two spots, a drive control section 30 which determines the different two spots on the article for the detection by the detector based on the design information and identifies the two spots as a pair of spots in such a manner that a difference between X-ray transmission paths at the different two spots on the article becomes a measured target when setting the spots, drive means 40 which moves the detector to the spots identified as a pair, and an arithmetic processing section 70 which calculates a thickness dimension of the measured target from the dosage of X-rays detected by the detector. |
