| 摘要 |
PROBLEM TO BE SOLVED: To provide a defect detection method for reducing influences of heat generated by laser beam on an object to be inspected.SOLUTION: The defect detection method includes: a definition process for defining a plurality of irradiation positions to a side surface smaller in area than a main surface of an object to be inspected and for defining a plurality of reception positions corresponding to the respective plurality of irradiation positions; a reception process for radiating laser beam to the irradiation positions and performing a process for receiving ultrasound at the reception positions corresponding to the irradiation positions at all the plurality of irradiation positions defined in the definition process; and a detection process for detecting defect of the object to be inspected on the basis of the ultrasound received in the reception process. The definition process defines the plurality of irradiation positions and the plurality of reception positions so that a plurality of intersection points are formed by a plurality of straight lines combining the irradiation positions and the reception positions corresponding to the radiation positions when viewed from the main surface side. The detection process detects defect at the respective positions of the plurality of intersection points. |
