TRANSPARENT CONDUCTIVE FILM LAMINATE, MANUFACTURING METHOD OF THE SAME, THIN FILM SOLAR CELL, AND MANUFACTURING METHOD OF THE SAME

摘要

PROBLEM TO BE SOLVED: To provide a transparent conductive film laminate, excellent in contact properties with a Si layer and in a light confinement effect, and useful as a surface electrode of a solar cell, and to provide a manufacturing method of the same, a thin film solar cell, and a manufacturing method of the same.SOLUTION: The transparent conductive film laminate has a three layer laminate structure which has an indium oxide transparent conductive film (I) 21 formed on a translucent substrate 1 as a substrate, and is formed sequentially on it with a zinc oxide transparent conductive film (II) 22 excellent in irregularity and a transparent conductive film (III) 23 having a high work function.