| 摘要 |
PROBLEM TO BE SOLVED: To provide a coating device which can make a uniform thickness precisely using a plurality of heads when coating a solution on the main surface of an object having a flat main surface.SOLUTION: A coating device 101 includes: a supporting unit 5 for supporting a substrate 6 in a manner that a main surface 6a is faced upward; and a plurality of heads 7, disposed above the main surface 6a and capable of being scanned relatively in the first direction. The plurality of heads 7 are aligned in the second direction 92 which is perpendicular to the first direction. Each head 7 includes: a slit 11 extending in the second direction 92; holes 12 for adjusting the discharge amount, disposed peripheral to each end of the slit 11; a pressurizing part for the slit to discharge the solution from the slit 11; and a driving part of the holes for the adjustment of the discharge amount, to discharge the solution from the holes 12 for adjusting the discharge amount. The driving part can fix the discharge amount of the solution independently of the pressurizing part for the slit. |
