| 摘要 |
PROBLEM TO BE SOLVED: To provide an inspection device for a semiconductor device capable of changing an electronic circuit for inspection into one chip for miniaturization, making an output impedance of an inspection signal supply circuit have a predetermined value, and accurately inspecting the semiconductor device of an inspection object without having any damage.SOLUTION: An inspection device for a semiconductor device has one semiconductor chip in which an inspection signal supply circuit for supplying an inspection signal to a semiconductor device to be measured, and a comparison circuit for inspecting a state of the semiconductor device to be measured by comparing an output signal from the semiconductor device to be measured with a reference value are formed. In the semiconductor chip, an impedance adjustment circuit is arranged which is for adjusting an output impedance of the inspection signal supply circuit. |
