发明名称 MAGNETIC DEVICE AND METHOD OF MANUFACTURING THE SAME
摘要 A magnetic device and a method of manufacturing the same. In the method, a lower magnetic layer, an insulation layer, and an upper magnetic layer are sequentially formed on a substrate. An upper magnetic layer pattern is formed by patterning the upper magnetic layer until an upper surface of the insulation layer is exposed. An isolation layer pattern is formed from portions of the insulation layer and the lower magnetic layer by performing an oxidation process on the exposed upper surface of the insulation layer, and an insulation layer pattern and a lower magnetic layer pattern are formed from portions of the insulation layer and the lower magnetic layer, where the isolation layer pattern is not formed.
申请公布号 US2013171743(A1) 申请公布日期 2013.07.04
申请号 US201213729147 申请日期 2012.12.28
申请人 LEE JANG-EUN;PARK SOON-OH;PARK SANG-HWAN;SHIN HEE-JU 发明人 LEE JANG-EUN;PARK SOON-OH;PARK SANG-HWAN;SHIN HEE-JU
分类号 H01L43/12 主分类号 H01L43/12
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