| 摘要 |
The invention relates to a method for manufacturing a multilayer structure (16) on a first substrate (30), the method including: using the first substrate made of a first material having a Young's modulus Ev and a thickness ev, and using a second substrate (12) covered by the multilayer structure, the second substrate being made of a second material having a Young's modulus Es that is different from the Young's modulus Ev and a thickness es, the thicknesses es and ev complying, plus or minus 10%, with the relation (I); molecularly bonding the first substrate and the multilayer structure together; and removing the second substrate. |
