| 摘要 |
To provide an external view inspection device and an external view inspection method with which it is possible to detect a shape of a specimen and a minute unevenness in the surface of the specimen, as well as to detect shine or color tone changes in the surface state, a specimen surface is illuminated with a slit light of light having an intermediate wavelength of three types of light having different wavelengths, reflection brightness data of the specimen surface is acquired from received reflected light, the specimen surface is illuminated with two lights of different wavelengths other than the intermediate wavelength in locations other than the location which is illuminated with the slit light such that surface data of the specimen surface is acquired from received reflected light, the presence of specimen surface unevenness is detected from the proportion of the intensities of the two lights, the reflected brightness data and the surface data are composited and color tone changes in the specimen surface are detected, and gloss in the specimen surface is detected based on the presence of unevenness and the color tone changes. |
