| 摘要 |
PURPOSE: An ultrasonic cleaning method is provided to easily clean an object in a solution by irradiating ultrasonic waves to the solution with a dissolved gas. CONSTITUTION: The dissolved gas concentration of a solution is controlled to a first dissolved gas concentration (S11). The irradiation of ultrasonic waves to the solution with the first dissolved gas concentration is started (S12). The dissolved gas concentration of the solution is controlled to a second dissolved gas concentration (S13). The irradiation of the ultrasonic waves is stopped (S14). [Reference numerals] (S11) Dissolved gas concentration is controlled to a first dissolved gas concentration; (S12) Irradiation of ultrasonic waves is started; (S13) Dissolved gas concentration of the solution is controlled to a second dissolved gas concentration; (S14) Irradiation of the ultrasonic waves is stopped |
