APPARATUS AND METHOD FOR MANUFACTURING COMPOSITE NANO PARTICLES

摘要

PURPOSE: A manufacturing apparatus of a composite nanoparticle is provided to prevent coagulation between particles by synthesizing a first precursor vaporized product and a second precursor vaporized product in a gas phase in an order through a U-shaped reaction chamber. CONSTITUTION: A manufacturing apparatus of a composite nanoparticle comprises a first precursor feeding unit (100), a second precursor feeding unit (200), a reaction unit (300), an oxygen supplying line (400) and a collecting unit (500). The first precursor feeding unit supplies the first precursor to the reaction unit after vaporizing. The second precursor feeding unit supplies the second precursor to the reaction unit after vaporizing. The reaction unit generates a composite nanoparticle synthesizing the first precursor vaporized product and the second precursor vaporized product. The oxygen supplying line supplies an oxygen source to the reaction unit. The collecting unit collects the composite nanoparticles generated from the reaction unit. The reaction unit comprises a U-shaped reaction chamber (310), a second precursor inlet liquid path (320) and a heat supplying means (330). The U-shaped reaction chamber has a first straight liquid path (312), a curbed liquid path (314), and a second straight liquid path (316).