EVAPORATION DEVICE FOR MANUFACTURING OF OLED HAVING APPARATUS FOR CHUCKING AND DECHUCKING

摘要

PURPOSE: An organic light emitting device production system having a chucking and a dechucking device is provided to produce a large area organic light emitting device by organically connecting the chucking device part, and a deposition part, and a dechucking device part. CONSTITUTION: A chucking device part (120) chucks an object substrate with a chuck plate. A deposition part (130) performs a thin film deposition process on a chucked substrate transferred from the chucking device part. A dechucking device (150) dechucks a deposited substrate transferred from the deposition part. The dechucking device discharges a processed substrate to the outside. The dechucking device part moves a separated chuck plate to the chucking device again.