发明名称 METHOD AND DEVICE FOR FORMING ORGANIC THIN FILM, AND METHOD FOR MANUFACTURING OF ORGANIC DEVICE
摘要 <p>There is provided a method of forming an organic thin film, capable of forming a single-crystal organic thin film easily and rapidly while controlling a thickness and a size. After an organic solution is supplied to one surface (a solution accumulating region wide in width, and a solution constricting region narrow in width and connected thereto) of a film-formation substrate supported by a support controllable in temperature, a movable body controllable in temperature independently of the support is moved along a surface of the support while being kept in contact with the organic solution. The temperature of the support is set at a temperature positioned between a solubility curve and a super-solubility curve concerning the organic solution, and the temperature of the movable body is set at a temperature positioned on a side higher in temperature than the solubility curve.</p>
申请公布号 EP2610899(A1) 申请公布日期 2013.07.03
申请号 EP20110819797 申请日期 2011.08.10
申请人 SONY CORPORATION 发明人 GOTO OSAMU;HOBARA DAISUKE;NOMOTO AKIHIRO;MURAKAMI YOSUKE;TOMIYA SHIGETAKA;KOBAYASHI NORIHITO;SHIMIZU KEISUKE;KATSUHARA MAO;OHE TAKAHIRO;KAWASHIMA NORIYUKI;TAKAHASHI YUKA;FUKUDA TOSHIO;ISHII YUI
分类号 H01L21/368;H01L21/336;H01L29/786;H01L51/05;H01L51/40 主分类号 H01L21/368
代理机构 代理人
主权项
地址