发明名称 |
METHOD AND DEVICE FOR FORMING ORGANIC THIN FILM, AND METHOD FOR MANUFACTURING OF ORGANIC DEVICE |
摘要 |
<p>There is provided a method of forming an organic thin film, capable of forming a single-crystal organic thin film easily and rapidly while controlling a thickness and a size. After an organic solution is supplied to one surface (a solution accumulating region wide in width, and a solution constricting region narrow in width and connected thereto) of a film-formation substrate supported by a support controllable in temperature, a movable body controllable in temperature independently of the support is moved along a surface of the support while being kept in contact with the organic solution. The temperature of the support is set at a temperature positioned between a solubility curve and a super-solubility curve concerning the organic solution, and the temperature of the movable body is set at a temperature positioned on a side higher in temperature than the solubility curve.</p> |
申请公布号 |
EP2610899(A1) |
申请公布日期 |
2013.07.03 |
申请号 |
EP20110819797 |
申请日期 |
2011.08.10 |
申请人 |
SONY CORPORATION |
发明人 |
GOTO OSAMU;HOBARA DAISUKE;NOMOTO AKIHIRO;MURAKAMI YOSUKE;TOMIYA SHIGETAKA;KOBAYASHI NORIHITO;SHIMIZU KEISUKE;KATSUHARA MAO;OHE TAKAHIRO;KAWASHIMA NORIYUKI;TAKAHASHI YUKA;FUKUDA TOSHIO;ISHII YUI |
分类号 |
H01L21/368;H01L21/336;H01L29/786;H01L51/05;H01L51/40 |
主分类号 |
H01L21/368 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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