发明名称 |
MANUFACTURING METHOD FOR SELF-ALIGNED MULTI-LAYER AND THIN-FILM ELECTRONIC DEVICE INCLUDING MULTI-LAYER MANUFACTURED THEREBY |
摘要 |
<p>PURPOSE: A thin film electric device including a self-aligned multi layer is provided to increase electric conductivity by forming a hydrophobic pattern at one time. CONSTITUTION: A hydrophobic pattern (200) is formed on a substrate. A first thin film (300) is formed in the hydrophilic surface of the substrate. A second thin film (400) is formed on the first thin film by using a selective wetting phenomenon. A plasma etching or a printing process is performed to form the hydrophobic pattern.</p> |
申请公布号 |
KR20130073184(A) |
申请公布日期 |
2013.07.03 |
申请号 |
KR20110140897 |
申请日期 |
2011.12.23 |
申请人 |
KOREA ADVANCED INSTITUTE OF SCIENCE AND TECHNOLOGY |
发明人 |
YOO, SEUNG HYUP;MOON, HAN UL |
分类号 |
H01L29/786;H01L51/50 |
主分类号 |
H01L29/786 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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