发明名称 MANUFACTURING METHOD FOR SELF-ALIGNED MULTI-LAYER AND THIN-FILM ELECTRONIC DEVICE INCLUDING MULTI-LAYER MANUFACTURED THEREBY
摘要 <p>PURPOSE: A thin film electric device including a self-aligned multi layer is provided to increase electric conductivity by forming a hydrophobic pattern at one time. CONSTITUTION: A hydrophobic pattern (200) is formed on a substrate. A first thin film (300) is formed in the hydrophilic surface of the substrate. A second thin film (400) is formed on the first thin film by using a selective wetting phenomenon. A plasma etching or a printing process is performed to form the hydrophobic pattern.</p>
申请公布号 KR20130073184(A) 申请公布日期 2013.07.03
申请号 KR20110140897 申请日期 2011.12.23
申请人 KOREA ADVANCED INSTITUTE OF SCIENCE AND TECHNOLOGY 发明人 YOO, SEUNG HYUP;MOON, HAN UL
分类号 H01L29/786;H01L51/50 主分类号 H01L29/786
代理机构 代理人
主权项
地址