APPARATUS OF CZOCHRALSKI SINGLE CRYSTAL SILICON INGOT

摘要

PURPOSE: An apparatus for manufacturing a single crystal silicon ingot is provided to secure a high quality ingot by restraining the generation of impurities. CONSTITUTION: A crucible is installed in a chamber. A susceptor supports the crucible. An inner crucible (130) is positioned in the crucible. A heater (140) heats the crucible. An insulator (150) prevents the thermal release of the heater.