| 摘要 |
PURPOSE: An evaporation source including an evaporation heating fixing member is provided to implement large size, by fastening fixing members to a heat dissipation plate by arranging the fixing members in multi stages. CONSTITUTION: An evaporation heater (300) is arranged in the side of the circumference of an evaporation vessel. The evaporation heater is arranged along the direction of circumference. An evaporation heater fixing member (400) is constituted with an upper fixing member and a lower fixing member. The upper fixing member and the lower fixing member have ring shape. The evaporation heater fixing member supports the evaporation heater from the outside. |
