发明名称 SHEET ATTACHING DEVICE AND ATTACHING METHOD
摘要 <p>A sheet attaching device(1) for attaching an adhesive sheet (MS) on an adherend (W) includes: a sheet support (6,7) that supports the adhesive sheet (MS) placed opposite to the adherend (W); a decompression unit(3) that keeps the adherend (W) and the adhesive sheet (MS) placed opposite to the adherend (W) in a decompressed atmosphere; an attaching unit (8A, 8B) that brings the adhesive sheet (MS) close to the adherend (W) under the decompressed atmosphere to attach the adhesive sheet (MS) to the adherend (W); and a gap removal unit(4) that removes a gap present between the adherend (W) and the adhesive sheet (MS) after the adherend (W) is attached on the adhesive sheet (MS).</p>
申请公布号 EP2610901(A1) 申请公布日期 2013.07.03
申请号 EP20110819739 申请日期 2011.07.28
申请人 LINTEC CORPORATION 发明人 TAKANO TAKESHI
分类号 H01L21/683 主分类号 H01L21/683
代理机构 代理人
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